JPS6196687U - - Google Patents
Info
- Publication number
- JPS6196687U JPS6196687U JP17979984U JP17979984U JPS6196687U JP S6196687 U JPS6196687 U JP S6196687U JP 17979984 U JP17979984 U JP 17979984U JP 17979984 U JP17979984 U JP 17979984U JP S6196687 U JPS6196687 U JP S6196687U
- Authority
- JP
- Japan
- Prior art keywords
- holding
- robot
- silicon wafer
- hand
- arc shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17979984U JPS6196687U (en]) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17979984U JPS6196687U (en]) | 1984-11-27 | 1984-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196687U true JPS6196687U (en]) | 1986-06-21 |
Family
ID=30737364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17979984U Pending JPS6196687U (en]) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196687U (en]) |
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1984
- 1984-11-27 JP JP17979984U patent/JPS6196687U/ja active Pending